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Document ID:
FED-STD-209
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Overview
Title:
Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones (S/S by ISO14644-1 and ISO14644-2)
Scope:
This document establishes standard classes, and provides for alternative classes, of air cleanliness for cleanrooms and clean zones based on specified concentrations of airborne particles. It prescribes methods for verifying air cleanliness and requires that a plan be established for monitoring air cleanliness. It also provides a method for determining and describing concentrations (U descriptors) of ultrafine particles.
Status:
Canceled
Cancellation Date:
29-NOV-2001
FSC/Area:
3694
Doc Category:
Federal Standard
Responsibilities
Lead Standardization Activity:
MI
Combat Capabilities Development Command, Aviation and Missile Center
Preparing Activity:
FSS
General Services Administration (Federal Supply Service) (S/S by FAS)
DoD Interest Level:
#
No official DoD interest has been registered
Coordination:
Limited
Revision History
Click on column headings for a description of column content.
Media
Document Part Description
Dist Stmt
Document Date
Pages
Size
Revision E Notice 1 - Cancellation
A
29-NOV-2001
1
29.3 KB
Revision E
A
11-SEP-1992
55
2938.9 KB
Revision D Change Notice 1
A
28-JAN-1991
5
276.8 KB
Revision D
A
15-JUN-1988
48
2216.7 KB
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